RF Sputter-Deposited Nanostructured CuO Films for Micro-Supercapacitors

Stress reduction in sputter deposited films using nanostructured compliant layers by high working-gas pressures

We present a strategy of stress reduction in sputter deposited films by a nano-compliant layer at the substrate using physically self-assembled nanostructures obtained at high working-gas pressures prior to the deposition of a continuous film. This technique is all in situ, and the nanostructures are made of the same material as the deposited thin film and requires no lithography process. This ...

Physical Properties of Reactively Sputter-Deposited C-N Thin Films

This work aims to prepare and study amorphous carbon nitride (CNx) films. Films were deposited by reactive magnetron radiofrequency (RF) sputtering from graphite target in argon and nitrogen mixture discharge at room temperature. The ratio of the gas flow rate was varied from 0.1 to 1. Deposited films were found to be amorphous. Highest Nitrogen concentration achieved was 42 atomic percent whic...

MoOx thin films deposited by magnetron sputtering as an anode for aqueous micro-supercapacitors

In order to examine the potential application of non-stoichiometric molybdenum oxide as anode materials for aqueous micro-supercapacitors, conductive MoO x films (2 ⩽ x ⩽ 2.3) deposited via RF magnetron sputtering at different temperatures were systematically studied for composition, structure and electrochemical properties in an aqueous solution of Li2SO4. The MoO x (x ≈ 2.3) film deposited at...

Metal-to-insulator transition in sputter deposited 3NiÕAl thin films

Sputter-deposited Sma Thin Films: Properties and Applications

Shape memory alloy (SMA) thin films formed by sputter deposition have attracted considerable attention in the last decade. Current intensive research demonstrated that thin films' unique fine microstructure is responsible for superior shape memory characteristics in films, compared to that of bulk materials. Simultaneously, much effort has been taken in the development and fabrication of microd...